There are materials in many formats that describe the development of MEMS gyroscopes. Using LCSH (Library of Congress subject headings) will give you the most relevant output when searching the library catalog, UCLS. Those terms may include:
Start with UCLS and you will retrieve all information sources: books, dissertations/theses, journal articles, videos, datasets, and you can refine the search using the left sidebar. Recommended for books, documents, and videos; use databases for journal articles, conference papers/proceedings, and business information.
Additional sources may be contained in any of the following research guides:
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